SIMS MICROSCOPIES
\sˈɪmz mˈa͡ɪkɹəskəpɪz], \sˈɪmz mˈaɪkɹəskəpɪz], \s_ˈɪ_m_z m_ˈaɪ_k_ɹ_ə_s_k_ə_p_ɪ_z]\
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A mass-spectrometric technique that is used for microscopic chemical analysis. A beam of primary ions with an energy of 5-20 kiloelectronvolts (keV) bombards a small spot on the surface of the sample under ultra-high vacuum conditions. Positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer in regards to their mass-to-charge ratio.
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